Spatial ALD Nano Coating Technology
Spatial Atomic Layer Deposition (ALD) technology enables you to design, and mass produce the next generation energy and display devices with a highly reduced use of scarce materials.
We support the quest for a sustainable planet and the development of better, cheaper, and higher-performing materials for the hydrogen, battery, display and solar markets.
Spatial Atomic Layer Deposition
Our equipment is used in optimizing OLED-displays, flexible electronics, yield improvement photovoltaic panels and many other applications. Discover how Spatial ALD makes an impact in your industry.
Hydrogen
Batteries
Solar Cells
Displays
Spatial ALD brings innovation to your products
State-of-the-art lab and fab equipment help our customers design and mass-produce the next-generation energy and display devices with a highly reduced use of scarce materials while maintaining excellent performance.
Fast
Scalable
Efficient
Versatile
Spatial ALD versus Traditional ALD
Find out how Spatial ALD can bring innovation to your products.
Traditional ALD
- High-quality 3D layers and suitable for porous substrates
- Limited deposition speed
- Limited in maximum substrates
Spatial ALD – Our solution
- A 100 times faster deposition speed than conventional ALD by our spatial technology in combination with proprietary plasma enhanced deposition
- Scalable to large surfaces and roll-to-roll
- No deposition on reactor walls
- Reclaim of unreacted precursor
- Maskless patterning
- Very high precursor efficiency
Upcoming events
More about our technology
De-carbonization with Spatial ALD
Thinner and stable layers to increase the number of loading cycles and increased energy density.
Our latest updates
Noord-Brabant’s Innovation Coalition for Hydrogen
Exciting news for the hydrogen revolution! SparkNano is proud to be part of…
Read moreShaping the European Lithium-Ion Battery Industry
We’re pleased to announce that SparkNano has been featured in Battery…
Read moreAAE – SparkNano Collaboration
We recently had the pleasure of participating in an internal event organized by…
Read more